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Micromechanics and MEMS, Classic and Seminal Papers to 1990

Edited by William Trimmer
with introductions to each topic

IEEE Product Number PC4390-QCL, ISBN 0-7803-1085-3
Phone 800 678 IEEE in USA or
Phone 908 981 0060 or Fax 908 981 9667
Cost $129.95, IEEE members $80.00

IEEE web address:

John Wiles & Sons  search on Micromechanics and MEMS

This book gives you valuable insights into the rapidly growing field of MEMS.

It is also an excellent tutorial on MEMS. The papers convey a sense of excitement and exploration. Collected for easy reading are well written papers describing the fundamentals of the MEMS field, and why it has developed in certain directions.

Until now, these MEMS papers have been scattered through the literature and in hard to find conference proceedings. The book is a must for scholarly MEMS research and for finding appropriate references for your papers.

It is especially hoped students and people new to the MEMS field will obtain this useful tutorial. Established researchers will find the book an invaluable reference.

The papers are arranged in topics with introductions to each section written by William Trimmer. Contents include: * Introduction * Comments on writing an article * Early papers on micromechanics * Side drive actuators * Comb drive actuators * Electrostatic actuators * Magnetic actuators * Harmonic motors (wobble motors) * Other actuators * Valves & Pumps * Fluidics * Surface micromachining * Bulk micromachining * LIGA * Computer aided design * Metrology

A sample of material in the book (from the introduction):

The original papers in a field provide a valuable perspective.

The original researchers in a field have no guide lines, no sense of the correct problems and approaches. Instead they are trying to define the field. These people tend to be innovators and synthesizers, and draw from a wide range of fields and insights to define fruitful areas of study. Their papers convey a sense of excitement and exploration.

Reading the original papers in a field is important for several reasons. First, the reader gains an appreciation of why the field has developed in certain directions. Often as the field develops, the original approaches should be modified, and the scientist who understands the original assumptions is more apt to make the breakthroughs and extensions. Buried in these original papers are plums for exploration that the earlier researchers did not have the time and tools to develop. Second, if one wants to do scholarly work, knowing the literature is a prerequisite. This is a matter of intellectual honesty. I see many papers claiming as new and novel results that have been in the literature for years. Publishers of this type of paper do themselves great harm with people who do understand the literature. Third, careful reading of the literature helps one's own work to be well considered and within the context of one's discipline.

The field of micromechanics or MicroElectroMechanical Systems (MEMS) is developing rapidly. We are in the process of writing the papers future scientists and engineers will consider the original papers of MEMS. Unfortunately, even now many of the original MEMS papers are already difficult to find. The papers, especially before the 1990's, tended to be published in hard to obtain conference proceedings, or scattered through a wide array of journals in related fields. Now publications such as the Journal of Microelectromechanical Systems, J of MEMS, (published jointly by the IEEE and ASME) are archiving these papers, so they are available to the scholar.

This book makes the early MEMS papers in micromechanics conveniently available to scholars, scientists, engineers, students, users, and people interested in this new technology. Fortunately, this literature makes less assumptions about what the reader knows, and a wide range of people can profit from reading these articles. It is especially hoped students studying micromechanics and MEMS will read the early papers.

The papers in this book are from 1990 and earlier. They combine to make a reasonably sized book one can conveniently use. After 1990 the literature expands rapidly, and including papers from this later material would necessitate leaving out earlier interesting articles. The literature after 1990 is also more readily accessible.

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